Current control for magnetized plasma in direct-current plasma-immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1564638
Reference28 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
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5. Plasma immersion ion implantation—a fledgling technique for semiconductor processing
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