Enhancing elastic stress relaxation in SiGe/Si heterostructures by Si pillar necking-Reference-Cited by-同舟云学术

Enhancing elastic stress relaxation in SiGe/Si heterostructures by Si pillar necking

Published:2016-10-31 Issue:18 Volume:109 Page:182112
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Isa F.¹²,Salvalaglio M.³⁴^ORCID,Arroyo Rojas Dasilva Y.²,Jung A.¹²,Isella G.⁵^ORCID,Erni R.²,Timotijevic B.⁶,Niedermann P.⁶^ORCID,Gröning P.⁷^ORCID,Montalenti F.³^ORCID,von Känel H.¹²

Affiliation:

1. Laboratory for Solid State Physics, ETH Zürich, Otto-Stern-Weg 1, Zürich CH-8093, Switzerland

2. Electron Microscopy Center Empa, Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, Dübendorf CH-8600, Switzerland

3. L-NESS and Department of Materials Science, Università di Milano-Bicocca, Via Cozzi 55, Milano I-20125, Italy

4. Institute for Scientific Computing, Technische Universität Dresden, Willers-Bau B – Zellescher Weg 12-14, Dresden D-01062, Germany

5. L-NESS and Department of Physics, Politecnico di Milano and IFN-CNR, Via Anzani 42, Como I-22100, Italy

6. CSEM, Rue Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland

7. Advanced Materials and Surfaces Department Empa, Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, Dübendorf CH-8600, Switzerland

Funder

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (SNF)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4966948

Reference26 articles.

1. The chips are down for Moore’s law

2. Moore's Law Forever?

3. Observation of vertical and lateral Ge segregation in thin undulating SiGe layers on Si by electron energy-loss spectroscopy

4. Strain in Nanoscale Germanium Hut Clusters on Si(001) Studied by X-Ray Diffraction

5. Calculation of critical layer thickness versus lattice mismatch for GexSi1−x/Si strained‐layer heterostructures

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