Spatial resolution limits in electron-beam-induced deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2085307
Reference46 articles.
1. The role of secondary electrons in electron-beam-induced-deposition spatial resolution
2. Direct fabrication of nanowires in an electron microscope
3. The growth behavior of self-standing tungsten tips fabricated by electron-beam-induced deposition using 200keV electrons
4. Electron-beam-induced deposition using a subnanometer-sized probe of high-energy electrons
5. Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3
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