Electron-beam-induced deposition using a subnanometer-sized probe of high-energy electrons
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1611274
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1. Focused ion beam induced deposition of gold
2. Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition
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