Emissivity of freestanding membranes with thin metal coatings
Author:
Affiliation:
1. ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven, The Netherlands
2. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands
Funder
Stichting voor Fundamenteel Onderzoek der Materie (FOM)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4936851
Reference15 articles.
1. Boron and silicon: filters for the extreme ultraviolet
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