A uniform step size, low-voltage piezoelectric motor with dual-channel force loop

Abstract

Recently, a variety of piezoelectric motors with remarkable performance have appeared. However, due to the hysteresis effect of piezoelectrics and stress return errors within the mechanical structures, the existing piezoelectric motors still face some challenges, such as inconsistent step size, high working voltage, and considerable speed variances during upward vs downward movements even under identical driving voltage signals. Here, we introduce a novel low-voltage piezoelectric motor with a dual-channel force loop based on piezoelectric stacks, in which each slider has two force loops connected with other sliders and the internal elastic preload element is installed, which can effectively address these issues. This new type of piezoelectric motor has low working voltage (starting voltage is only 0.8 V, significantly lower than that of conventional piezoelectric motors), large driving force, uniform step size, and excellent linearity.