A rigid and compact piezoelectric motor with high output efficiency

Abstract

We introduce a novel piezoelectric stepper motor featuring high compactness, rigidity, and any direction operability. Here, not only is the structure of high novelty but also the working principle very simple. The piezo stacks unit is sandwiched between two spring finger pieces, with almost equal clamping forces applied between the top of the piezo stacks’ unit and the spring finger piece. Applying individual driving signals to each of the five piezo stack pairs, causing deformation one by one in the same direction, followed by simultaneous recovery in the reverse direction, enables movement of the frame part. The optimized clamping force of the piezoelectric stack units and spring fingers ensures maximum output force. The motor’s operational capability at low threshold voltages, specifically 8 V for downward movement and 10 V for upward movement, confirmed its efficacy in both vertical and horizontal directions. The motor’s operational capability at a low threshold voltage of 10 V confirmed its efficacy in both vertical and horizontal directions. At room temperature, step size ranges from 0.3 to 7.4 µm at 20 Hz frequency and varying driving voltage from 10 to 180 V. It has a maximum travel range of about 5 mm and can lift a maximum load of 220 g in an upward direction, so the maximum output force generated by this motor is 2.2 N. The compact and rigid design is capable of building an atomically resolved scanning probe microscope, and its working ability has the potential to use the cleavage of different types of samples in limited space environments, such as the small-bore superconducting magnet and low temperature.