Experimental and theoretical study of hole scattering in RF sputtered p-type Cu2O thin films

Abstract

One of the key materials of interest for p-type oxide semiconductor thin film electronics is cuprous oxide (Cu2O), due to its relatively high hole mobility. In this work, we use experiments, analytical models, and density functional theory calculations to study the scattering mechanisms that determine Hall mobility in two Cu2O samples. First, we examine a polycrystalline Cu2O thin film deposited by RF magnetron sputtering, and second, a single-crystalline Cu2O bulk substrate. Temperature-dependent Hall measurements indicate that neutral impurity and grain boundary scattering are dominant for the polycrystalline Cu2O thin film, while phonon scattering is dominant for single-crystalline Cu2O. Our first-principles calculations show that the room-temperature intrinsic hole mobility of Cu2O is 106 cm2 V−1 s−1, indicating the great promise of the material for p-type electronic devices. This intrinsic mobility is limited by phonon scattering, with the most dominant scattering modes having phonon energies of 88.4 and 17.1 meV. These results indicate that the key pathways to increase the hole mobility in Cu2O thin films are by reducing the impurity concentration and by increasing grain size. Our work thus sets the stage for the future development of high performance Cu2O-based p-type thin film transistors.