Observation and modeling of the initial fast interdiffusion regime in Si/SiGe multilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1508424
Reference33 articles.
1. Thermal relaxation of pseudomorphic Si‐Ge superlattices by enhanced diffusion and dislocation multiplication
2. Interdiffusion and strain relaxation in (SimGen)psuperlattices
3. X‐ray reflectometry study of interdiffusion in Si/Ge heterostructures
4. X-ray scattering analysis of interface roughness and diffusion
5. Interdiffusion in a symmetrically strained Ge/Si superlattice
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3. Germanium–tin interdiffusion in strained Ge/GeSn multiple-quantum-well structure;Journal of Physics D: Applied Physics;2016-05-04
4. Experiments and Modeling of Si-Ge Interdiffusion with Partial Strain Relaxation in Epitaxial SiGe Heterostructures;ECS Journal of Solid State Science and Technology;2014
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