Differences between interfacial and surface molybdenum in the formation of TiSi[sub 2]-Reference-Cited by-同舟云学术

Differences between interfacial and surface molybdenum in the formation of TiSi[sub 2]

Published:2001 Issue:3 Volume:89 Page:1641
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Zhang S.-L.,Zhang Z.-B.,Zhu D.-Z.,Xu H.-J.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference34 articles.

1. Influence of molybdenum on the formation of C54 TiSi2: Template phenomenon versus grain-size effect

2. Effect of ultrathin Mo and MoSix layer on Ti silicide reaction

3. F. M. d’Heurle, P. Gas, I. Engström, S. Nygren, M. Östling, and C. S. Petersson, IBM Research Report RC 11151, No. 50067 (1985).

4. Enhanced formation of the C54 phase of TiSi2 by an interposed layer of molybdenum

5. A. Mouroux, S.-L. Zhang, W. Kaplan, S. Nygren, M. Östling, and C. S. Petersson, inAdvanced Metallization for ULSI, edited by K. N. Tu, J. W. Mayer, J. M. Poate, and L. J. Chen (Materials Research Society, Pittsburgh, 1996), pp. 511–516.

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of Ag addition on phase transformation and resistivity of TiSi2 thin films;Applied Surface Science;2011-01

2. Solid phase reaction in Ti(thin film)/Si(substrate) with Mo interlayer: SXES and PEEM study;Thin Solid Films;2004-10

3. Metal Silicides in CMOS Technology: Past, Present, and Future Trends;Critical Reviews in Solid State and Materials Sciences;2003-11

4. Different routes to the formation of C54 TiSi2 in the presence of surface and interface molybdenum: A transmission electron microscopy study;Journal of Materials Research;2002-04

5. FORMATION OF C54 TiSi2 ON Si(100) USING Ti/Mo AND Mo/Ti BILAYERS;International Journal of Modern Physics B;2002-01-20