Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown onp‐Si by metalorganic chemical vapor deposition at low temperature-Reference-Cited by-同舟云学术

Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown onp‐Si by metalorganic chemical vapor deposition at low temperature

Published:1994-03-14 Issue:11 Volume:64 Page:1407-1409
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Kim T. W.,Jung M.,Kim H. J.,Park T. H.,Yoon Y. S.,Kang W. N.,Yom S. S.,Na H. K.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.111898

Reference22 articles.

1. InP/SiO2MIS structure

2. Inversion layers on InP

3. InP–SiO2 m.i.s. structure with reduced interface state density near conduction band

4. Electrical properties of SiO2 and Si3N4 dielectric layers on InP

5. The deposition of insulators onto InP using plasma-enhanced chemical vapour deposition

Cited by 42 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of the Ti/Si ratio of spin coating solutions on surface passivation of crystalline silicon by TiOx–SiOxcomposite films;Japanese Journal of Applied Physics;2017-05-31

2. Effects of Roll-to-Roll Sputtering Conditions on the Properties of Flexible TiO2Films;Journal of the Korean Ceramic Society;2014-05-31

3. ‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications;Coordination Chemistry Reviews;2013-12

4. Study the optical properties of titanium oxide thin films deposited on glass substrate at different deposition angles by resistive evaporation method;Optik - International Journal for Light and Electron Optics;2013-09

5. Synthesis of TiO2 thin films using single molecular precursors by MOCVD method for dye-sensitized solar cells application and study on film growth mechanism;Materials Research Bulletin;2012-10