Quality factor of the piezoelectric thin film on semiconductor composite resonator resulting from radiation into the semiconductor wafer
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337183
Reference5 articles.
1. Fundamental‐mode VHF/UHF minature acoustic resonators and filters on silicon
2. Acoustic bulk wave composite resonators
3. ZnO/SiO2-diaphragm composite resonator on a silicon wafer
4. Low‐temperature coefficient bulk acoustic wave composite resonators
5. An analysis of thickness‐extensional trapped energy resonant device structures with rectangular electrodes in the piezoelectric thin film on silicon configuration
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Analysis Method for Two-Port Film Bulk Acoustic Resonator UsingS-Parameter Measurement;Japanese Journal of Applied Physics;2007-12-06
2. Micromachined acoustic wave resonator isolated from substrate;IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control;2005-08
3. Thickness‐field excited thickness‐shear resonators in (110) GaAs;Applied Physics Letters;1995-01-16
4. A perturbation calculation of the quality factor of the piezoelectric thin film on semiconductor composite resonator resulting from radiation into the wafer;Journal of Applied Physics;1987-11-15
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