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High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper

  • Published:2007-05-21 Issue:21 Volume:90 Page:212114
  • ISSN:0003-6951
  • Container-title:Applied Physics Letters
  • language:en
  • Short-container-title:Appl. Phys. Lett.

Author:

Kim Minkyu,Jeong Jong Han,Lee Hun Jung,Ahn Tae Kyung,Shin Hyun Soo,Park Jin-Seong,Jeong Jae Kyeong,Mo Yeon-Gon,Kim Hye Dong

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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