Dislocation blocking in elastically anisotropic semiconductor thin films
Author:
Affiliation:
1. Electronics Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA
Funder
Office of Naval Research
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/am-pdf/10.1063/5.0043964
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1. Plastic relaxation and relaxed buffer layers for semiconductor epitaxy
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4. Stress dependence of dislocation glide activation energy in single-crystal silicon-germanium alloys up to 2.6 GPa
5. Threading dislocation reduction in strained layers
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