Investigation of temperature dependent dielectric constant of a sputtered TiN thin film by spectroscopic ellipsometry
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4862485
Reference19 articles.
1. Evaluation of optical properties of decorative coatings by spectroscopic ellipsometry
2. Optical, electronic, and transport properties of nanocrystalline titanium nitride thin films
3. The effect of thermal treatment on the structure, optical and electrical properties of amorphous titanium nitride thin films
4. Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films
5. In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
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