Note: Development of a compact aperture-type XYθz positioning stage-Reference-Cited by-同舟云学术

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Note: Development of a compact aperture-type XYθz positioning stage

Published:2016-03 Issue:3 Volume:87 Page:036112
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Park Jaehyun¹,Lee Hakjun¹,Kim Hyunchang²,Kim Hyoyoung³,Gweon Daegab¹

Affiliation:

1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea

2. Mechatronics R&D Center, Samsung Electronics Co., Ltd., Hwaseong, South Korea

3. Manufacturing System R&D Group, KITECH, Seobuk-gu, Cheonan 331-822, South Korea

Publisher

AIP Publishing

Subject

Instrumentation

Reference13 articles.

1. Optimal design of a flexure hinge based XYφ wafer stage

2. Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

3. Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage

4. Design and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges

5. Development of a compact and long range XYθz nano-positioning stage

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1. Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes;Microsystem Technologies;2024-04-26

2. Electro-mechanical transfer matrix modeling of piezoelectric actuators and application for elliptical flexure amplifiers;Precision Engineering;2024-01

3. Two types of morphing wing designs based on multistage displacement amplification mechanisms;Journal of Mechanical Science and Technology;2023-06

4. A non-redundant piezoelectric center-rotation platform with a single-layer structure and a large working range;Mechatronics;2022-12

5. Modeling and Verification for a Three-Degree-of-Freedom Flexure-Based Planar Parallel Micro Manipulator;Journal of Mechanisms and Robotics;2022-11-10

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