Effect of ambient combinations of argon, oxygen, and hydrogen on the properties of DC magnetron sputtered indium tin oxide films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/adva/5/1/1.4906566.pdf?itemId=/content/aip/journal/adva/5/1/10.1063/1.4906566&mimeType=pdf&containerItemId=content/aip/journal/adva
Reference37 articles.
1. rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications
2. Preparation of ITO thin films applied in nanocrystalline silicon solar cells
3. Electron dephasing in homogeneous and inhomogeneous indium tin oxide thin films
4. Structural characterization of sputtered indium oxide films deposited at room temperature
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