Planar microwave discharges with active control of plasma uniformity
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1447256
Reference21 articles.
1. Gegeneration of a Microwave Plasma Using Traveling Waves
2. Resist stripping in an O2+H2O plasma downstream
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