Emission spectroscopy on a supersonically expanding argon/silane plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350850
Reference15 articles.
1. Fast deposition of plasma polymer layers
2. Amorphous hydrogenated silicon films produced by an expanding argon-silane plasma investigated with spectroscopic IR ellipsometry
3. Description of a flowing cascade arc plasma
4. Emission spectroscopy of SiH in a silane glow-discharge
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