Multiparameter measurements of thin films using beam‐profile reflectometry
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352421
Reference4 articles.
1. Optical thickness measurement of SiO2Si3N4 films on silicon
2. Beam profile reflectometry: A new technique for dielectric film measurements
3. Nondestructive Determination of Thickness and Refractive Index of Transparent Films
4. Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances
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