Highly sensitive AFM using self-excited weakly coupled cantilevers-Reference-Cited by-同舟云学术

Highly sensitive AFM using self-excited weakly coupled cantilevers

Published:2019-09-23 Issue:13 Volume:115 Page:133105
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Lin Y.¹,Yabuno H.¹^ORCID,Liu X.¹,Yamamoto Y.²^ORCID,Matsumoto S.³^ORCID

Affiliation:

1. Graduate School of Systems and Information Engineering, University of Tsukuba, Tsukuba Science City 305-8573, Japan

2. Fluid Property Standards Group, Research Institute for Engineering Measurement, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8563, Japan

3. Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan

Funder

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5115836

Reference17 articles.

1. Atomic Force Microscope

2. Frequency modulation detection using high‐Qcantilevers for enhanced force microscope sensitivity

3. Analysis of the effect of mechanical properties of liquid and geometrical parameters of cantilever on the frequency response function of AFM