Deposition of SiC films by pulsed excimer laser ablation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103346
Reference10 articles.
1. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
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3. Epitaxial Growth and Characterization of β ‐ SiC Thin Films
4. Observation of two distinct components during pulsed laser deposition of highTcsuperconducting films
5. Y‐Ba‐Cu‐O superconducting films produced by long‐pulse laser vaporization
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