Air-bridged lateral epitaxial overgrowth of GaN thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126775
Reference19 articles.
1. Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy
2. Defect structure in selectively grown GaN films with low threading dislocation density
3. Transmission electron microscopy of defects in GaN films formed by epitaxial lateral overgrowth
4. Microstructure of GaN laterally overgrown by metalorganic chemical vapor deposition
5. High-quality coalescence of laterally overgrown GaN stripes on GaN/sapphire seed layers
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