1. Changchun University of Technology, Key Laboratory of Micro/Nano and Ultra-precision Manufacturing (Jilin Province), School of Mechatronic Engineering, Changchun 130012, China
2. Department of Industrial, Welding and Systems Engineering, Ohio State University, 210 Baker Systems Building, 1971 Neil Avenue, Columbus, Ohio 43210, USA
3. Changchun Institute of Optics, Fine Mechanics and Physic, Chinese Academy of Sciences, 3888 Southeast Lake Road, Changchun 130033, China