Hydrogen redistribution and gettering in AlCu/Ti thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347483
Reference10 articles.
1. Measurements of hydrogen in metal‐oxide‐semiconductor structures using nuclear reaction profiling
2. Ion beam analysis of edge effects in Al/M/Al stripes
3. Intermetallic compounds of Al and transitions metals: Effect of electromigration in 1–2‐μm‐wide lines
4. Evaluation of Titanium as a Diffusion Barrier Between Aluminum and Silicon for 1.2 μm CMOS Integrated Circuits
5. A semiautomatic algorithm for rutherford backscattering analysis
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