Self-organized antireflecting nano-cone arrays on Si (100) induced by ion bombardment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3560539
Reference39 articles.
1. How will physics be involved in silicon microelectronics
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4. Dynamics of pattern formation during low-energy ion bombardment of Si(001)
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