Optical emission spectroscopy and time-of-flight investigations of plasmas generated from AlN targets in cases of pulsed laser deposition with sub-ps and ns ultraviolet laser pulses
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1539537
Reference18 articles.
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3. Ultrafast ablation with high-pulse-rate lasers. Part I: Theoretical considerations
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1. Influence of aluminum microparticles on plasma chemistry and structural dynamics of ns-laser ablated 5-methyl-1H-tetrazole in argon atmosphere;Journal of Analytical Atomic Spectrometry;2022
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3. Epitaxial growth mechanism of pulsed laser deposited AlN films on Si (111) substrates;CrystEngComm;2014
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5. Structural and optical characterization of AlN films grown by pulsed laser deposition;Applied Surface Science;2005-07
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