The initial stages of atomic force microscope based local anodic oxidation of silicon
Author:
Affiliation:
1. Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, 630090 Novosibirsk, Russia
2. Novosibirsk State University, 630090 Novosibirsk, Russia
Funder
Russian Science Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5007914
Reference30 articles.
1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
2. Atomic Force Microscope
3. Room temperature operated single electron transistor made by STM/AFM nano-oxidation process
4. Role of space charge in scanned probe oxidation
5. The theory of the formation of protective oxide films on metals.—III
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