Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography-Reference-Cited by-同舟云学术

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Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

Published:2024-06 Issue: Volume:658 Page:159869
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Komonov A.I.,Mantsurov N.D.,Voloshin B.V.,Seleznev V.A.,Mutilin S.V.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Reference60 articles.

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2. Evolution in lithography techniques: microlithography to nanolithography;Sharma;Nanomaterials,2022

3. The art of SPM: Scanning Probe Microscopy in Materials Science;Loos;Adv. Mater.,2005

4. Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning;Liu;Microsyst. Nanoeng.,2023

5. Scanning probe lithography: state-of-the-art and future perspectives;Fan;Micromachines,2022

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of VO₂ Hierarchical Micro-Nanostructure Arrays by Oxidation Scanning Probe Lithography;2024 IEEE 25th International Conference of Young Professionals in Electron Devices and Materials (EDM);2024-06-28

2. Phase-transition materials for thermal tuning of metasurfaces;Semiconductors and Semimetals;2024

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