Author:
Ghannam M. Y.,Dutton R. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
16 articles.
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1. Polysilicon Substrates;Encyclopedia of Materials: Science and Technology;2001
2. Polycrystalline Silicon in ULSI;Encyclopedia of Materials: Science and Technology;2001
3. Structure;Polycrystalline Silicon for Integrated Circuits and Displays;1998
4. Discontinuity of B‐diffusion profiles at the interface of polycrystalline Si and single crystal Si;Journal of Applied Physics;1993-04-15
5. Epitaxial regrowth ofn+andp+polycrystalline silicon layers given single and double diffusions;Journal of Applied Physics;1992-10