A novel alignment mechanism employing orthogonal connected multi-layered flexible hinges for both leveling and centering
Author:
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4722946
Reference23 articles.
1. A generalized model for conic flexure hinges
2. Development of a step micro-imprint lithography tool
3. Stiffness characterization of corner-filleted flexure hinges
4. Design calculations for flexure hinges
5. Analysis of a novel flexure hinge with three degrees of freedom
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