Plasma-assisted As implants for effective work function modulation of TiN/HfO2 gate stacks on germanium

Author:

Kothari Shraddha1,Vaidya Dhirendra1,Nejad Hasan2ORCID,Variam Naushad2,Ganguly Swaroop1ORCID,Lodha Saurabh1

Affiliation:

1. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai 400076, India

2. Applied Materials Inc., Gloucester, Massachusetts 01930-2297, USA

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Reference31 articles.

1. Y. J. Lee , T. C. Hong , F. K. Hsueh , P. J. Sung , C. Y. Chen , S. S. Chuang , T. C. Cho , S. Noda , Y. C. Tsou , K. H. Kao , C. T. Wu , T. Y. Yu , Y. L. Jian , C. J. Su , Y. M. Huang , W. H. Huang , B. Y. Chen , M. C. Chen , K. P. Huang , J. Y. Li , M. J. Chen , Y. Li , S. Samukawa , W. F. Wu , G. W. Huang , J. M. Shieh , T. Y. Tseng , T. S. Chao , Y. H. Wang , and W. K. Yeh , in 2016 IEEE International Electron Devices Meeting (IEDM) (2016), pp. 33.5.1–33.5.4.

2. Y. C. Yeo , X. Gong , M. J. H. van Dal , G. Vellianitis , and M. Passlack , in 2015 IEEE International Electron Devices Meeting (IEDM) (2015), pp. 2.4.1–2.4.4.

3. H. Wu , W. Luo , H. Zhou , M. Si , J. Zhang , and P. D. Ye , in 2015 Symposium on VLSI Technology (VLSI Technology) (2015), pp. T58–T59.

4. J. Mitard , L. Witters , Y. Sasaki , H. Arimura , A. Schulze , R. Loo , L. Ragnarsson , A. Hikavyy , D. Cott , T. Chiarella , S. Kubicek , H. Mertens , R. Ritzenthaler , C. Vrancken , P. Favia , H. Bender , N. Horiguchi , K. Barla , D. Mocuta , A. Mocuta , N. Collaert , and A. V. Y. Thean , in 2016 IEEE Symposium on VLSI Technology (2016), pp. 1–2.

5. High-Performance $\hbox{GeO}_{2}/\hbox{Ge}$ nMOSFETs With Source/Drain Junctions Formed by Gas-Phase Doping

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