Patterning of indium tin oxide by projection photoablation and lift-off process for fabrication of flat-panel displays
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2751594
Reference11 articles.
1. UV Lasers
2. K. Jain, Excimer Laser Lithography (SPIE, Bellingham, WA, 1990), pp. 176–189.
3. Self‐developing photoetching of poly(ethylene terephthalate) films by far‐ultraviolet excimer laser radiation
4. Excimer laser polymer ablation: the first 20 years
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