Incorporation of La in epitaxial SrTiO3 thin films grown by atomic layer deposition on SrTiO3-buffered Si (001) substrates-Reference-Cited by-同舟云学术

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Incorporation of La in epitaxial SrTiO3 thin films grown by atomic layer deposition on SrTiO3-buffered Si (001) substrates

Published:2014-06-14 Issue:22 Volume:115 Page:224108
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

McDaniel Martin D.,Posadas Agham,Ngo Thong Q.,Karako Christine M.,Bruley John,Frank Martin M.,Narayanan Vijay,Demkov Alexander A.,Ekerdt John G.

Funder

NSF

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4883767

Reference44 articles.

1. Crystalline Oxides on Silicon: The First Five Monolayers

2. Physical Structure and Inversion Charge at a Semiconductor Interface with a Crystalline Oxide

3. Integration of Functional Oxides with Semiconductors

4. Development of integrated heterostructures on silicon by MBE

5. Optical properties of epitaxial SrHfO3 thin films grown on Si

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1. Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements;Advanced Materials Interfaces;2024-08-23

2. Epitaxial integration of ferroelectric and conductive perovskites on silicon;Journal of Vacuum Science & Technology A;2020-03

3. Atomic layer deposition of functional multicomponent oxides;APL Materials;2019-11-01

4. Epitaxial BaSnO3 and SrSnO3 perovskite growth on SrTiO3(001) via atomic layer deposition;Journal of Vacuum Science & Technology A;2019-09

5. Atomic layer deposition of epitaxial ferroelectric barium titanate on Si(001) for electronic and photonic applications;Journal of Applied Physics;2019-08-14

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