Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3046717
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1. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
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3. IEEE International Ultrasonics Symposium;Larson J. D.,2004
4. Characterization of sol-gel Pb(Zr0.53Ti0.47)O3 in thin film bulk acoustic resonators
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