Crossover of the preferred growth orientation of AlN/Si(001) films during off-axis radio frequency sputter growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1598273
Reference16 articles.
1. Acoustic surface wave properties of epitaxially grown aluminum nitride and gallium nitride on sapphire
2. Low‐temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering
3. Dependence of Geometric Magnetic Anisotropy in Thin Iron Films
4. Anisotropy in Permalloy Films
5. Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence
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