Pulsed CO2laser etching of polyimide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96989
Reference8 articles.
1. Kinetics of the ablative photodecomposition of organic polymers in the far ultraviolet (193 nm)
2. Direct etching of polymeric materials using a XeCl laser
3. Calorimetric and acoustic study of ultraviolet laser ablation of polymers
4. Excimer laser etching of polyimide
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