An optical instrument for overall stress and local stress relaxation analysis in thin metal films
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147850
Reference13 articles.
1. Real-time study of migration in aluminum films by means of subÅngström-sensitive scattering and profiling methods
2. Mechanical properties of thin films
3. Modeling the Development and Relaxation of Stresses in Films
4. Strain distribution in thin aluminum films using x‐ray depth profiling
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