Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370607
Reference24 articles.
1. XeCl Excimer Laser Annealing Used to Fabricate Poly-Si TFT's
2. Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid‐phase crystallization: Theory, experiments, and thin‐film transistor applications
3. Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
4. Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
5. Low-temperature polysilicon thin-film transistors fabricated from laser-processed sputtered-silicon films
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