Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators-Reference-Cited by-同舟云学术

Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators

Published:2021-10-18 Issue:16 Volume:119 Page:163503
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Zhang Ya¹^ORCID,Yoshioka Yuri¹^ORCID,Iimori Mirai¹^ORCID,Qiu Boqi²^ORCID,Liu Xin³^ORCID,Hirakawa Kazuhiko²⁴^ORCID

Affiliation:

1. Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, 184-8588, Japan

2. Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

3. Beijing-Dublin International College and Institute of Theoretical Physics, Beijing University of Technology, 100 Pingleyuan, Beijing, 100124, People's Republic of China

4. Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

Funder

Adaptable and Seamless Technology Transfer Program through Target-Driven R and D

MEXT Grant-in-Aid for Scientific Research on Innovative Areas

Japan Society for the Promotion of Science

Mitsubishi Foundation

Murata Science Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0065271

Reference36 articles.

1. Nanoelectromechanical systems

2. Cantilever-like micromechanical sensors

3. Ultrasensitive nanoelectromechanical mass detection

4. A nanometre-scale mechanical electrometer

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