Simulations of sputtering induced roughening and formation of surface topography in deposition of amorphous diamond films with mass separated kiloelectronvolt ion beams
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366472
Reference46 articles.
1. Diamond-ceramic composite tool coatings
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5. Thermal measurements on diamond and related materials
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1. Nanopatterning of swinging substrates by ion-beam sputtering;Journal of Applied Physics;2016-05-28
2. Kinetic Monte Carlo simulation of self-organized pattern formation induced by ion beam sputtering using crater functions;Physical Review B;2015-02-26
3. Surface morphology and interface chemistry under ion irradiation – Simultaneous atomistic simulation of collisional and thermal kinetics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-12
4. Self-Organized Surface Nanopatterning by Ion Beam Sputtering;Toward Functional Nanomaterials;2009
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