Modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1688443
Reference12 articles.
1. Laser‐induced fluorescence characterization of ions in a magnetron plasma
2. Sputter deposition for semiconductor manufacturing
3. Overview of plasma source ion implantation research at University of Wisconsin–Madison
4. Plasma doping for the fabrication of ultra-shallow junctions
5. Plasma doping for shallow junctions
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