Investigation of deformations and strain fields in silicon matrix structures embedded with vertically stacked Ge(Si) self-assembled islands
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4900554
Reference26 articles.
1. Effects of spacer thickness on optical properties of stacked Ge/Si quantum dots grown by chemical vapor deposition
2. Effect of interlayer strain interaction on the island composition and ordering in Ge/Si(001) island superlattices
3. Applications of electron nanodiffraction
4. Strain measurement for the semiconductor industry with nm-scale resolution by dark field electron holography and nanobeam electron diffraction
5. Strain mapping for the semiconductor industry by dark-field electron holography and nanobeam electron diffraction with nm resolution
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