Some experimental aspects of dc reactive sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.324546
Reference12 articles.
1. Reactive sputtering of metals in oxidizing atmospheres
2. The deposition rate of metallic thin films in the reactive sputtering process
3. Mechanism of rf reactive sputtering
4. Sputtering of metals in the presence of reactive gases
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