Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films-Reference-Cited by-同舟云学术

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Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

Published:2012-05 Issue:9 Volume:111 Page:093527
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zukauskaite Agne,Wingqvist Gunilla,Palisaitis Justinas,Jensen Jens,Persson Per O. Å.,Matloub Ramin,Muralt Paul,Kim Yunseok,Birch Jens,Hultman Lars

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4714220

Reference26 articles.

1. When group-III nitrides go infrared: New properties and perspectives

2. Mechanical properties and machining performance of Ti1−xAlxN-coated cutting tools

3. Age hardening in arc-evaporated ZrAlN thin films

4. Spontaneous polarization and piezoelectric constants of III-V nitrides

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4. Understanding Interfaces in AlScN/GaN Heterostructures;Advanced Functional Materials;2024-04-24

5. Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere;Journal of Applied Physics;2024-03-26

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