New photothermal deflection method for thermal diffusivity measurement of semiconductor wafers
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147589
Reference11 articles.
1. In situ investigation of transport in semiconductors: A contactless approach
2. Mirage-effect measurement of thermal diffusivity. Part I: experiment
3. Photoacoustic and related photothermal techniques
4. A contactless method for investigating the thermal properties of thin films
5. Thermal conductivity and interface thermal resistance of Si film on Si substrate determined by photothermal displacement interferometry
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