Growth of Lattice Defects in Silicon during Oxidation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1713179
Reference3 articles.
1. Surface Damage and Copper Precipitation in Silicon
2. Copper Precipitation on Dislocations in Silicon
3. The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam
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