X‐Ray Diffraction Analyses and Etch Patterns of Faults in Epitaxial Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1713173
Reference6 articles.
1. Crystallographic Imperfections in Epitaxially Grown Silicon
2. X‐Ray Analysis of Stacking Fault Structures in Epitaxially Grown Silicon
3. Method for the Detection of Dislocations in Silicon by X-Ray Extinction Contrast
4. Method for the Detection of Dislocations in Silicon by X-Ray Extinction Contrast
5. Effect of Thermal History on the Dislocation Substructure near the Surfaces of a Lithium Fluoride Crystal
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1. Elastic, plastic and cracking indentation behavior of silicon crystals;Materials Science and Engineering: A;1996-05
2. X-Ray Diffraction Microscopy;Microstructural Analysis;1973
3. Expanded Tables of Berg—Barrett Skew Reflections from (Ioo), (IIo) and (III) Oriented Silicon Surfaces for Cu, Co, Fe and CrK∝ Radiations†;International Journal of Electronics;1967-11
4. Silicon power device material problems;Proceedings of the IEEE;1967
5. The Analysis of Berg-Barrett Skew Reflections and Their Applications in the Observation of Process-Induced Imperfections in (111) Silicon Wafers;Advances in X-Ray Analysis;1967
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