Wet thermal oxidation of AlxGa1−xAs compounds
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357169
Reference20 articles.
1. A Degradation due to Surface Oxidations in GaAIAs Red Light Emitting Diodes and a Prevention of It
2. Environmental degradation of AlxGa1−xAs‐GaAs quantum‐well heterostructures
3. Native oxide stabilization of AlAs‐GaAs heterostructures
4. Multidielectrics for GaAs MIS devices using composition‐graded AlxGa1−xAs and oxidized AlAs
5. Plasma oxidation of GaAs
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1. Wet oxidation of thin AlAs in cylindrical composite of GaAs/AlAs/GaAs;Materials Chemistry and Physics;2011-11
2. Optimal control of AlAs oxidation via digital alloy heterostructure compositions;Journal of Physics D: Applied Physics;2009-08-17
3. The Influence of InxGa1–xAs and GaAs1–yPy Layers Surrounding the AlAs Release Layer in the Epitaxial Lift-Off Process;Crystal Growth & Design;2007-11-17
4. Wet Oxidation in a Square Sandwich Composite of GaAs/AlAs/GaAs;Journal of Electronic Materials;2007-09-19
5. Enhanced kinetics of Al0.97Ga0.03As wet oxidation through the use of hydrogenation;Applied Physics Letters;2006-09-11
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