Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336908
Reference35 articles.
1. Precipitation of oxygen in dislocation-free silicon
2. Octahedral precipitates in high temperature annealed Czochralski-grown silicon
3. Early stages of oxygen segregation and precipitation in silicon
4. Structure of Thermally-Induced Microdefects in Czochralski Silicon
5. The effect of doping on the formation of swirl defects in dislocation-free czochralski-grown silicon crystals
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